We succeeded in commercializing the active vibration control system for the first time in Korea through the development of pneumatic servo valves required in the semiconductor and optical fields, achieved the complete localization of AVIS by developing and applying force-balance acceleration sensor.

Active control systems utilize real-time vibration measurements and data feedback to effectively control micro-vibration in semiconductors, ultra-precise processes and measurements, and passive control systems control vibration efficiently to suit equipment characteristics such as equipment weight.