Korea Institute of Science and Technology
4J16
- President오상록
- Tel02-958-6318
- E-mailnkh@kist.re.kr
- Websitehttp://www.kist.re.kr
- Exhibit fieldNano devices, Nano materials, Nano Fabrication, Nano Measurement&Analysis
introduction
The KIST Micro-Nano Fab Center is a key national infrastructure supporting advanced fields that require ultra-fine processing, such as semiconductors, sensors, and quantum devices.
We provide unit processes and customized fabrication services to various institutions.
Major Item introduction
R&D and technical support for micro/nano devices using MEMS/NEMS technology
Equipment : 64 units
Lithography : Maskless, EVG Align, E-beam litho, etc.
Depo : Sputter, PECVD, E-Beam Evaporator, etc.
Etch : Deep RIE, ICP, RIE, etc.
Measurement : ALPHA STEP, etc.
Others : Dicing, Wafer Bonder, etc.
